Suppression of resonant leakage effects in coplanar MMIC packages using a silicon sub-mount layer

In this paper, we examined the resonant leakage effects of coplanar MMIC (Microwave and millimeter-wave Monolithic Integrated Circuit) substrates and experimented with a resonance suppression method using a silicon sub-mount layer in a wide frequency range from 0.5 to 40 GHz. The resonant behaviors of S-parameters due to the leakage resonance are greatly improved by absorbing the leakage using the lossy Si layer.