Design, Preparation, and Performance of a Planar Ignitor Inserted With PyroMEMS Safe and Arm Device

A planar ignitor-based on low temperature co-fired ceramic (LTCC) and pyrotechnical micro electro mechanical system (PyroMEMS) technologies was designed and prepared in this paper. The planar ignitor is mainly composed of output charge layer, silicon safe and arm (Si-S&A) layer, and LTCC circuit base. Si/Pb
₃
O
₄
, C
₆
H
₂
(NO
₂
)
₃
OK/KClO
₄
, and B/KNO
₃
were selected as ignition charge, gas charge, and transfer charge, respectively. The ignition circuit and main structure of the planar igniter were made by the LTCC process. Si-S&A was etched from monocrystalline silicon, which does not need environmental force to disarm. Preparation process of main components of planar ignitor that is suitable for mass production was introduced in detail. Simulation of PyroMEMS S&A actuation based on pendulum method was performed to save time for proof test. Finally, experimental verification on PyroMEMS S&A actuation and combustion propagation of B/KNO
₃
transfer charge were completed successfully. Results show that the idea of a planar ignitor inserted with PyroMEMS S&A device is feasible.