Small-signal characteristics of bottom-emitting intracavity contacted VCSEL's

We characterize the small-signal frequency response of intracavity contacted /spl sim/970 nm VCSEL's designed for flip-chip bonding to electronic circuits and then modified with reduced capacitance and a novel lateral current injection method to obtain a high-speed response. We measure 3-dB bandwidths in excess of 10 GHz and an extracted K-factor limited f-max of 95 GHz for fabricated single-mode /spl sim/970-nm lasers.