System design for micropositioning and sensing of micro-electromechanical (MEM) actuators

We present the system design and open loop positioning of a large displacement (/spl sim/25 /spl mu/m), single crystal silicon, folded spring lateral actuator. The static and dynamic characteristics of the actuator are measured and the actuator resembles a linear, mass-spring-damper second order system. The 25 /spl mu/m static displacement is obtained at 68 V. Dynamic positioning is demonstrated by an open loop displacement stepping of 13 /spl mu/m.