Prototype feedback-controlled bidirectional actuation system for MEMS applications

We have successfully developed a one degree-of-freedom microsuspension system, with active position control, as a paradigm of a micromagnetic bearing. This system integrates an electromagnetic actuator, a position sensor, and a feedback control system that provides active position control. This paper discusses the design and fabrication details of the microelectromechanical system (MEMS) components: the beam mass structure integrated with a drive coil and metallized targets, spacer plate, and sensor coils. It also discusses their integration with millimagnets and electronics. Noncontact magnetic bearings based on this principle have the potential of overcoming the tribo-physical issues associated with active MEMS devices.