An efficient crosstalk parameter extraction method for high-speed interconnection lines

A proposal is presented for an effective extraction method for crosstalk model parameters of high-speed interconnection lines. In the extraction procedure, mutual capacitance and mutual inductance of the coupled interconnection lines are extracted based on S-parameter measurement, time-domain-reflectometry (TDR) measurement and subsequent microwave network analysis. The extraction method is useful for characterizing homogeneous guiding structures, where the propagation of coupled transverse electromagnetic (TEM) modes is supported. In contrast to previous extraction methods, the suggested procedure requires fewer on-wafer probing steps and does not need matched terminations in the test device for high-frequency probing. The extracted models can be readily used with simulation program with integrated circuit emphasis (SPICE) circuit simulation. The procedure can also be used for modeling the crosstalk in packaging structures and multichip modules (MCMs). The proposed procedure has been successfully applied to the crosstalk model extraction of on-chip interconnection lines. Crosstalk model parameters were obtained for different line structures, spaces, and widths. Finally, the validity and reliability of the extracted models were examined by comparing a SPICE circuit simulation using the extracted crosstalk model parameters with high-speed time-domain crosstalk measurement. A close agreement was observed in the amplitude and pulse shape between the simulation and the measurement, showing the accuracy and usefulness of the proposed extraction method.