Engineering ESD Robust LDMOS SCR Devices in FinFET Technology

A robust FinFET silicon-controlled rectifier (SCR) LDMOS ESD protection device is developed. Replacing the drain contact implant to the P+ implant from N+ implant creates an SCR inside the LDMOS and when the N+ contact is removed a Schottky SCR LDMOS is created. The ESD performance of the baseline FinFET LDMOS is Zero, while that of the SCR LDMOS is 9.2 mA/um and Schottky SCR is 4.6 mA/μm respectively.