Actuation of Piezoelectric Layered Beams With $d_{31}$ and $d_{33}$ Coupling

In this paper, we derive and compare the linear static bending of piezoelectric actuators with transversal (d
₃₁
) and longitudinal (d
₃₃
) coupling. The transducers are, respectively, structures utilizing top and bottom electrodes (TBEs) and interdigitated electrodes (IDEs). While the theory is well developed for the TBE beam, governing equations for the bending of the piezoelectric beams with IDEs are far less developed. We improve on this by deriving the governing equation for the IDE beam with an arbitrary number of layers and with coupling consistently included. In addition, we introduce a phenomenological quadratic form for the nonuniform field that lets us derive a deflection formula with nontrivial effects of the field accounted for. The theory is applied to derive deflection formulas for both cantilever and clamped-clamped beams. All analytic results are validated with numerical simulations. From the analytic models, two different figures of merit (FOMs) are derived. We show that these FOMs are the same for cantilevers and doubly clamped beams. The analysis indicates the optimal transducer length for clamped-clamped beams and gives a criterion that can be used to determine which design concept (d
₃₁
or d
₃₃
) gives the largest deflection.