A Method for the Suppression of Multiple Spurious Modes

This paper reports on a novel electrode design technique for spur suppression in parallel-plate piezoelectric resonators with minimal impact on the intended vibration mode. To demonstrate this technique, fabricated two-port resonators were designed to optimally excite the first harmonic of length extension in a lead zirconate titanate-on-silicon resonator and suppress chosen higher harmonics. The targeted harmonics have been largely suppressed, while the intended mode experienced no change in magnitude. This is the first step towards a general technique for suppression of an arbitrary mode.