Piezoresistive Accelerometer Mathematical Model Development With Experimental Validation

This paper is mainly focused on piezoresistive accelerometer performance improvement. Thus a new model of this sensor is derived to enhance its various parameters, such as precision, sensitivity, and reliability. Moreover, applying this model, a new design of piezoresistive accelerometer can be achieved. The developed model is validated by simulations and confirmed by experimental tests to verify its effectiveness in industrial applications. The comparison study showed that the best choice of damping rate to reduce the measurement error and increase the precision corresponds to the rate chosen in this paper. The results have also demonstrated that a more reliable sensor can be designed compared with the existing designs.