Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure

This paper introduces the design and optimization of a new piezo-driven compact XY parallel stage for micro/nano-positioning applications. The compact parallel stage is developed with a stacked design. A displacement amplifier is adopted to amplify the stroke of piezo actuator. The amplifier is then improved and integrated with the decoupler to isolate the two actuators. The main design variables of the stage are optimized by applying a genetic algorithm based on finite-element analysis (FEA) for achieving the required performance. The designed stage is then further improved to enhance the stage's performance. The performance of the proposed XY precision stage is verified by performing FEA simulation studies.