Vertically Stacked Cantilever n-Type Poly-Si Junctionless Nanowire Transistor and Its Series Resistance Limit

We had successfully suspended the vertically stacked cantilever (VSC) nanowire by two approaches: 1) inserting a SiN layer as reinforcement to sustain the gate-stack thermal budget and 2) adopting high-k metal gate low-temperature process and realizing gate-all-around structure, which shows better subthreshold characteristics. Feasibility of improving current level within the same footprint and without degrading subthreshold performance is demonstrated. Series resistance limit is pointed out as a bottle neck for current increment with respect to layers of channels. Further investigation of reducing the series resistance of VSC nanowire is needed for any future circuit integration.