An efficient method for obtaining performance bounds of semiconductor manufacturing systems

The paper presents an efficient method that applies Markovian timed Petri nets to performance analysis of semiconductor manufacturing systems. A uniformization technique is used to establish both lower and upper bounds of the performance of interest. These bounds are computed using linear programming approaches. Different experiments have been conducted on medium-sized semiconductor manufacturing models to test the accuracy of the proposed technique. Preliminary results on the relationship of the solution and the constraints are discussed.