Evaluation of cluster tool throughput for thin film head production

This paper describes the application of simulation for analyzing cluster tool cycle times and cluster tool capacity planning. The objective of this project was to develop a flexible and expandable tool for rapidly calculating tool cycle times for a multiple step process through alternative tool configurations. The calculated process cycle times are then used to calculate equipment tool set requirements against product demand. The Seagate Industrial Engineering group utilized a simulation based cluster tool model developed to predict cluster tool cycle times and analyze cluster tool capacity across multiple tools and compare with results from static probability based model predictions.