Frequency-dependent series resistance of monolithic spiral inductors

We present the analysis of the frequency dependent inductor series resistance (R/sub s/). The high-frequency effects on series resistance have been confirmed with measured and simulated data of inductors having different geometric and process parameters in order to predict and optimize the high-performance inductors used in radio frequency (RF) integrated circuits (ICs). The results show that the magnetic field effect seems to be a dominant factor in determining the R/sub s/ in the high-frequency region.