Overcoming scaling concerns in a radiation-hardened CMOS technology

Scaling efforts to develop an advanced radiation-hardened CMOS process to support a 4M SRAM are described. Issues encountered during scaling of transistor, isolation, and resistor elements are discussed, as well as the solutions used to overcome these issues. Transistor data, total dose radiation results, and the performance of novel resistors for prevention of single event upsets (SEU) are presented.