Intrinsic stresses in CrN coatings deposited at different angles of incidence ions

In the model of the nonlocal thermoelastic peak of low energy ion, formula for intrinsic stress in the coating deposited from an inclined beam of ions in the modes of DC and pulsed bias potential is obtained. The stresses in the CrN coating deposited from Cr ion flux in the pulse-potential mode at various incidence angles of ions are calculated. Calculation shows that stresses at incident angles can be both less and more than stress arising at normal incidence of the ions, depending on the bias potential. Non-monotonic behavior of intrinsic stress with incidence angle increasing is established.