A MEMS high-speed rotation measurement system with MCNC fabricated motion and reference sensors using wireless transmission

A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm/sup 2/ was developed using the MCNC multi-user MEMS processes. This paper reports the initial characterization of the sensor and presents the results of transmitting the sensor data via various commercial wireless transmission chips. Initial results indicate that this piezoresistive sensor is capable of measuring rotation speeds from 1000 to 4000 rpm with linear output. The responsivity of the sensor is 3 Hz/rpm in this region.