A new developed in-line dose monitor

For the new generation ion implantation, a standard criterion in order to evaluate the uniformity and the absolute dose for low dose implantation down to 1E11/cm/sup 2/ is indispensable. A dose monitor of multi-Faraday type has been developed and incorporated into the newly released ion implanter IW-series, This monitor realizes in-line calibration over the wide energy range from several hundred to several keV. The system structure and characteristics will be discussed.