Low-loss and strongly confined InGaAsP-InP optical waveguide fabricated by benzocyclobutene wafer bonding

Strongly confined and low loss optical waveguides are the key elements of many integrated optical devices. Recently, BCB, a relatively new class of organic polymers, have been used either as the guiding layer or bonding layer to fabricate low loss optical waveguides. In this paper, we report the fabrication and loss measurements of benzocyclobutene (BCB) bonded InGaAsP-InP optical waveguide with very strong two-dimensional confinement. The wafer structure for bonding is grown by molecular beam epitaxy (MBE).