Waveguide-integrated high-speed and high-power photodiode with >105 GHz bandwidth

We demonstrate evanescently-coupled waveguide modified uni-traveling-carrier (MUTC) photodiodes with more than 105 GHz bandwidth. The photodiodes have dark currents as low as nA and deliver RF output powers of 5.1 dBm, 4.4 dBm and 3.5 dBm at 75 GHz, 80 GHz and 90GHz, respectively.