A 3.5 GHz AlN S1 lamb mode resonator

This paper presents a 3.5 GHz aluminum nitride (AlN) microelectromechanical system (MEMS) resonator. The high frequency resonance is attained by exploiting the high phase velocity S1 Lamb mode in an AlN thin film. Finite element analyses (FEA) are employed to show a high phase velocity larger than 50000 m/s and a large electromechanical coupling of 3.6% for S1 when h
_AlN
=0.1λ. As predicted by the simulation, the fabricated resonator demonstrates a high frequency resonance at 3.5 GHz and a large electromechanical coupling (k
_t
²
) of 3.59%. Among the demonstrated S1 mode deviecs, this work has achieved the highest product of merit, f · k
_t
²
· Q, of 69.1.