A micromechanical resonant optical power meter

This paper presents a new kind of micromechanical optical power meter using a micro disk resonator. With the change of laser power irradiated on the surface of resonator, the resonant frequency of the micromechanical resonator drifts because of its body temperature change. The simulation result is verified by the experimental data. A linear relationship between the laser power and the resonant frequency is obtained by both open-loop and closed-loop experiments. The minimum detectable optical power is found to be 0.98μW. The response time of the detector is less than 0.3s when the optical power changes.