Spin-coated piezoelectric-polymer composite based acoustic resonators and transducers

We present a novel composite comprised of piezoelectric PMN-PT nanoparticles embedded in a SU8 polymer matrix that can be spin coated on any substrate to realize acoustic resonators and transducers. High Overtone Bulk Acoustic Resonators (HBARs) are fabricated using this novel composite on a low acoustic loss silicon substrate. Initial experimental results yield piezoelectric coefficient (d33) as high as 216pm/V for the composite, indicating the possibility of designing efficient acoustic transducers.