Using an inverted FMEA to manage change and reduce risk in a FAB

This paper presents a Change Management System which incorporates the elements found in most semiconductor factories. They include the following: A Change Review Board; Checklist of characterization techniques; Specifications to guide engineers; Documentation and Communication of the Changes. The integral element of this system is the formal use of an inverted FMEA to guide the change agent to the appropriate evaluation methodology and qualification plan. Use of this method is found to be effective at preventing scrap and minimizing risk to the product performance.