Special Section on the 2017 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH)

As guest editors for the special section on the 2017 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH), we are pleased to present IEEE Transactions on Semiconductor Manufacturing readers with a selection of papers based on work presented at this year’s conference. The CS-MANTECH conference provides a technical forum for presenting advances in compound semiconductor devices and associated manufacturing technologies. The high performance of devices based on compound semiconductors has long made them the material of choice in RF, microwave, and millimeter-wave systems. While advances continue to be made in these traditional applications, compound semiconductors are increasingly finding their way into power systems via SiC and GaN device technologies, and are also increasingly integrated with silicon-based technologies to provide enhanced system-level performance and functionality. In addition, narrow-gap III-Vs are being explored as alternative-channel materials for aggressively-scaled logic.