MEMS-based optical switch design for reconfigurable, fault-tolerant optical backplanes

One of the critical components in developing reconfigurable, fault-tolerant optical backplanes is a low-cost optical switch. Microelectromechanical systems (MEMS) are a strong candidate for fabricating a low-cost optical switch. In this paper, we discuss the design issues for such a switch. Furthermore, using the material discussed in this report, we have designed a complete MEMS-based optical switch. It was submitted for prototype manufacturing in May 1999.