TOF-SIMS analysis for surface contaminant on dielectric anti-reflective coating

Time-of-flight Secondary Ion Mass Spectrometry is a well-known surface analysis technique for surface trace level contaminants due to the strength of ultra-high surface sensitivity. However, the mass spectral interpretation for useful information from thousands of elemental and molecular ions is complicated. In this paper, a simpler but effective way for the case study analysis of surface contaminant on DARC by TOF-SIMS is shown.