ESD Behavior of MWCNT Interconnects—Part I: Observations and Insights

Multiwall carbon nanotube (MWCNT)-based interconnects have been shown to outperform conventional metal interconnects. For reliable operation of such interconnects, it is imperative to evaluate their reliability at possible fatal events. Here, we report the ESD reliability of MWCNT-based interconnects. High failure current of ~10 mA and unique failure behavior involving discrete and gradual breakdown of individual shells is reported. It was found that MWCNT interconnects change resistance in steps of fundamental quantum resistance (h/2e
²
) after individual shell burning. The role of individual shells, diameter, and resistance of the tube in deciding the ESD behavior is investigated, while monitoring the response on a shell-by-shell basis. Contrary to widespread notion of immunity of MWCNT interconnects to electromigration, the ESD-induced melting of contacts is also observed.