Characterization of a high dynamic range lab-on-CMOS capacitance sensor array

We describe a capacitance sensor array that has been incorporated into a lab-on-CMOS system for applications in monitoring cell viability. This paper presents measured experimental results of a high dynamic range capacitance sensor array. The sensors have been characterized and the data fitted to analytical models, allowing end-to-end calibration of the responses. The sensor exhibits a sensitivity of up to 593 kHz/fF, resolution down to 17.5 aF, and an input sensing range of 12 fF.