Using an Optical Motion Sensor for Visualization and Analysis of Maintenance Work on Semiconductor Manufacturing Equipment

We developed a motion capture technique to record a worker's movements during preventive maintenance, especially wiping actions during wet cleaning. Time-series 3-D coordinate data of the worker's hand was successfully obtained with a motion capture sensor, and four different possible movements were distinguished. This data was also correlated with changes in the number of particles on the surface of a chamber part before and after wiping. The results show that key indicators of high-quality maintenance work can be extracted from workers' motions using this technique.