Research on a new control method of pulse magnetron sputtering power supply

Based on a composite control strategy consisting of variable speed integral PI control and improved repetitive control, a new pulse sputtering power is designed in this paper. Firstly, ARM is used as controller to control PWM driving signal in the system. Secondly, we introduce a pulse generating circuit and analyze its working principle. At the same time, a composite control method is designed in detail. Finally, by simulation, it is proved that the power supply has characteristics of good control performance, simple and reliable control and energy feedback.