Tribological characteristics of SiN/sub x/ films

The tribological performance and chemical compositions of thick (75 nm-120 nm) amorphous SiN/sub x/ films are studied with CSS testers and XPS. A high-speed H/D contact program is used to provide intermittent head/disc contacts. Films with high Si/N ratio (1.25) and high oxygen concentration (22%) have the best durability. Films' durability is also affected by the sputtering conditions used to prepare films. A higher N/sub 2//Ar ratio will produce a lower durability film. The film durability is not sensitive to the total pressure and sputtering power in the range of 5-15 mTorr and 1-4 kWatt.