Integration of high-frequency carrier-type thin-film magnetic field sensor with SmCo thin-film bias magnet

A bridge-connected high-frequency carrier-type thin-film magnetic field sensor is fabricated on a SmCo magnetic thin-film which provides an in-plane dc bias magnetic field to the sensor. The dc bias field of 320 A/m is achieved by using a 3 /spl mu/m thick SmCo underlayer. The sensitivity obtained is 8.4 mV/Oe which is 12 times as large as that without the SmCo thin-film magnet.