Characteristics of twin spiral type thin film inductor with Fe-based nanocrystalline core

A new type of thin film inductor with Fe-based nanocrystalline core is proposed and we investigated the characteristics of the inductor with varying frequency. We used a dry and wet process for fabricating the inductor. In order to improve mutual inductance in the center of the inductor, current direction is set opposite in each coil. The inductance of the simulated and the fabricated inductor are 1170 nH and 800 nH at 1 MHz, respectively. The difference of the value is considered to be caused by strip line broadening and local demagnetization field.