Preparation of Fe/Ag granular films by low energy cluster deposition

We prepared Fe/Ag granular films in which 5-nm Fe clusters were embedded in a Ag matrix by a newly developed cluster deposition method. The concentration of the Fe clusters in the films was controlled over wide range, and Fe/Ag granular films having metallic luster and strong adhesion were obtained. In films with a low concentration of Fe clusters, superparamagnetic behavior was observed, while films with an Fe content higher than 20 at% demonstrated ferromagnetic behavior. The film of Fe:35 at% had a low coercive force of 5 Oe.