Low noise voltage reference for MEMS acceleration sensor readout circuit

A low noise voltage reference is designed in this paper. The voltage reference structure is realized by using a low noise bandgap reference and a low pass filter. A +/- 3.7V voltage reference chip with low noise has been fabricated in a standard CMOS 0.5μm technology. By selecting suitable feedback resistance of the amplifier, the two measured results show that the noise of voltage reference VRP is reduced from 82.16μV to 8.58μV and the noise of voltage reference VRN is reduced from 146.12μV to 9.1μV.