Manufacturing technology of all-solid-state thin-film battery for stand-alone MEMS/sensor application

All-solid-state thin-film secondary batteries have come to be recognized as one of the key enabling technologies for stand-alone MEMS/sensor devices which are essential for internet of things. However, metallic lithium, which is commonly used as an anode layer in thin-film secondary batteries, has low melting point, so it is not applicable for high-density packaging including high-temperature process such as through-silicon via and solder-reflow process. Silicon is a promising candidate to replace metallic lithium due to high theoretical capacity. In this work, a-Si/LiPON/LiCoO
₂
cell which is prepared by sputtering technique confirms good reliability during 150 cycles without cracks, and also presents high-temperature tolerance.