Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping

The aim of this study is to measure the quality factor (Q) for double-ended tuning fork (DETF) devices dominated by Thermoelastic Dissipation (TED) and width-extensional (WE) devices dominated by Anchor Damping over a wide temperature range. Testing of these two device families over this wide range led to two related findings. First, our results indicate that it is possible to completely account for the dissipation in these devices through the use of quantitative models and measurements over a wide temperature range. A second finding, presented for the first time, is that anchor damping can be clearly seen in WE mode devices, and this damping term shows a clear temperature dependence.