Study on the influence induced by electrical coupling among interconnection lines in MEMS gyroscopes

This paper analyzes the influence of the electrical coupling among interconnection lines in MEMS gyroscopes and proposes strategies during designing structure to eliminate its effect. Moreover, a compensation circuit is designed to further suppress coupling signal at the readout. The results of bias drift tests under full temperature range indicate that not only the bias drift in the vacuum is much smaller than at atmospheric pressure, but also the coupling signal can be decayed efficiently after compensation. The fluctuation of the bias drift is decreased by 95.5% at atmospheric pressure while 89.1% in the vacuum.