Double MZI Micro-Opto-Mechanical Pressure Sensors for increased sensitivity and pressure range

This paper presents a novel integrated Micro-OptoMechanical Pressure Sensor that exhibits an excellent measurement precision in a large pressure range. The performance gain compared to classical designs is obtained by using a phase shift and by combining two MachZendher Interferometers (MZIs) on a single membrane: one with high sensitivity and one with large range. A balanced design and a power tap output allow to de-embed the noise generated by the laser and eases bandwidth requirements, allowing the use of an off-the-shelf laser diode. Using low-temperature deposited PECVD SiN as waveguide core, the new MZI Micro-Opto-Mechanical Pressure Sensor can be post-processed directly on CMOS imager/detector wafers.