Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators

This paper presents a topology optimization approach for reducing thermo-elastic dissipation (TED) in MEMS resonators. This algorithm is applied to a clamped-clamped resonant beam to maximize the quality factor (Q). Optimal designs have a Q ten times higher than a solid beam and are 75% higher than previously optimized devices. Furthermore, new designs have intuitive topologies. Beams are fabricated in <;111> silicon wafers and experimental measurements of Q agree well with simulation.