Managing the negative impact of recipe diversity on wet process tools and capacity: a multi-fabricator model

This paper describes the results of a multi-fabricator site team in minimizing recipe diversity; the metrics used to measure the progress of the team are also defined. By identifying and measuring the differences in recipe and process locations within a route, process changes were implemented to make the process operations more standard between various fabricators and the technologies at a given fabricator. This work has resulted in eliminating unnecessary cleans, minimizing differences between various technologies, eliminating chemistries used for only a few recipes, and propagating the best practices among the fabricators.