Improved quality factor spiral inductors on GaAs substrates

We present test data for several spiral inductors with improved quality factors fabricated on GaAs substrates. It has been shown experimentally that the quality factor of spiral inductors can be increased by reducing magnetically induced currents and by narrowing the line width of the inner turns similar to the one reported for silicon micromachined inductor. Using this technique, we observed about 22% improvement in the quality factor of spiral inductors as compared to standard spiral inductors having constant line width.