Interaction of F/sub 2/ excimer laser light with various types of synthetic SiO/sub 2/ glasses: towards the 3rd generation of synthetic silica

The authors consider the VUV-UV optical transmission spectra of synthetic silica specimens before and after F/sub 2/ laser irradiation. The absorption edge in the specimens differs from sample to sample: the absorption edge of the F-doped specimen is located at a shorter wavelength (153 nn) compared with the wet SiO/sub 2/ (155 nm) or the dry SiO/sub 2/ (157nm).