Electrodynamic characterization of a cavity-type microwave plasma source

In this work the electrodynamic characterization of a cavity-type microwave plasma source (MPS) operated at 915 MHz was presented. The work was aimed at finding a better design of the MPS for ensuring a higher microwave power energy transfer from the microwave feeding line to the sustained plasma. In this analysis a standard model of microwave plasma and two-port method, developed by Nowakowska et al., supported with one-time simulation of the electric field distribution inside the MPS with plasma, was used.