Temperature compensated super-high-frequency (2–8 GHz) surface acoustic wave devices

This works investigates temperature driven stability of super-high-frequency surface acoustic wave (SAW) devices. The interdigitated transducers (IDTs) were fabricated using electron beam lithography on a single crystal piezoelectric (PE) substrate to achieve SAW wavelength down to 400 nm. The temperature compensation was achieved by using a SiO
2
capping layer on top of IDTs. The fabricated SAW devices exhibit a low temperature coefficient of frequency (TCF) of ∼ −20 ppm/°C while operating at 2–8 GHz.