Surface modification and creation of nano-objects for nanoelectronics

The practical use of a scanning tunneling microscope for modifying the sample surface and for creation of nano-objects on the sample surface is shown. The possibility of modification of the sample surface by tunneling current was shown. Nano-objects on the surface of the experimental samples were created using contact and non-contact modification of surface. This may also enable preparation of the surface for subsequent applications in which it is necessary to reduce the average irregularities of the surface.