Study of environmental survivability and stability of Folded MEMS IMU

This paper presents a study on the structural rigidity of an Inertial Measurement Unit (IMU) implemented using the Folded MEMS approach. For such folded structures, environmental survivability and stability is a natural concern. We investigated IMUs of 35 mm
³
(small) and 130 mm
³
(medium) in volume, in the shape of a cube and a pyramid, and considered the reinforcement methods, including epoxy, eutectic solder, and silicon welding. Experimental characterization of a medium cube with eutectic reinforcement showed the maximum tilt of 0.2 mrad on the cube's sidewalls under temperature variation 25°C-90°C and the tilt of 0.2mrad under 10Hz to 20kHz vibration. An IMU error model was implemented, with the target sensors performance of tactical-grade, using in-run bias stability and scale factor (SF) stability for gyroscope (1°/hr, 100ppm) and for accelerometer (100μg, 100ppm), and a pre-defined trajectory with 122s flight time. The 0.2 mrad misalignment for the medium eutectic-soldered cube corresponded to a Circular Error Probable (CEP) rate of 1.25 nmi/hr, and a typical tactical grade IMU corresponded to CEP rate ≤1nmi/hr. We also concluded that the 35mm
³
eutectic-bonding reinforced cubes will survive the mechanical shock under 10,000g, while silicon welding reinforced cubes of 35 mm
³
would survive the shocks of 20,000g.