Parametrized model of MEMS microphone in comsol multiphysics

In this paper we present the parameterized model of MEMS condenser microphone built in Comsol Multiphysics environment. It is based on coupled electromechanic FEM simulation with help of analytical modelling. The model uses set of parameters that describes the structure dimensions and applied loads. The user attention is needed only for putting those parameters and choosing the desired types of simulation studies. The rest actions are performed automatically including the visualization of the results. The simulation studies were defined to calculate the microphone parameters such as membrane deflection, capacitance, pull-in voltage and sensitivity in both mV/Pa and dBV units.